Volume 23; Issue 1-3

Sensors and Actuators A: Physical

Volume 23; Issue 1-3
1

Design properties of polycrystalline silicon

Year:
1990
Language:
english
File:
PDF, 651 KB
english, 1990
2

Porous silicon morpbologies and formation mechanism

Year:
1990
Language:
english
File:
PDF, 1.99 MB
english, 1990
3

SOI Structure pressure transducer formed by oxidized porous silicon

Year:
1990
Language:
english
File:
PDF, 523 KB
english, 1990
4

Creep of sensor's elastic elements: Metals versus non-metals

Year:
1990
Language:
english
File:
PDF, 288 KB
english, 1990
7

Plastic deformation of higly doped Silicon

Year:
1990
Language:
english
File:
PDF, 1.21 MB
english, 1990
9

Fracture toughness characterization of brittle thin films

Year:
1990
Language:
english
File:
PDF, 743 KB
english, 1990
11

PVDF Film multifunction sensors

Year:
1990
Language:
english
File:
PDF, 166 KB
english, 1990
13

Vertically structured silicon membrane by electrochemical etching

Year:
1990
Language:
english
File:
PDF, 1.07 MB
english, 1990
14

A sub-micron particle filter in silicon

Year:
1990
Language:
english
File:
PDF, 483 KB
english, 1990
17

Silicon fusion bonding for fabrication of sensors, actuators and microstructures

Year:
1990
Language:
english
File:
PDF, 1.56 MB
english, 1990
18

Fusing silicon wafers with low melting temperature glass

Year:
1990
Language:
english
File:
PDF, 302 KB
english, 1990
21

A new silicon micromachining method using SOI/SDB technology

Year:
1990
Language:
english
File:
PDF, 212 KB
english, 1990
23

Micromachining of quartz and its application to an acceleration sensor

Year:
1990
Language:
english
File:
PDF, 704 KB
english, 1990
26

The fabrication and use of micromachined corrugated silicon diaphragms

Year:
1990
Language:
english
File:
PDF, 648 KB
english, 1990
30

Laser-assisted direct writing of strain sensitive silicon resistors

Year:
1990
Language:
english
File:
PDF, 1.05 MB
english, 1990
33

NH4Oh-based etchants for silicon micromachining

Year:
1990
Language:
english
File:
PDF, 1.04 MB
english, 1990
34

Compensation structures for convex corner micromachining in silicon

Year:
1990
Language:
english
File:
PDF, 1.20 MB
english, 1990
40

Optical fiber transducers using Fabry-Perot resonators

Year:
1990
Language:
english
File:
PDF, 321 KB
english, 1990
42

Fibre optic sensors for the characterization of particle size and flow velocity

Year:
1990
Language:
english
File:
PDF, 445 KB
english, 1990
44

Hybrid fiber-optic/micromechanical frequency encoding displacement sensor

Year:
1990
Language:
english
File:
PDF, 1002 KB
english, 1990
46

Plasmon wave versus dielectric waveguiding for surface wave sensing

Year:
1990
Language:
english
File:
PDF, 322 KB
english, 1990
47

Optical fibre device for chemical seming based on surface plasmon excitridon

Year:
1990
Language:
english
File:
PDF, 242 KB
english, 1990
51

Author index of volumes A21–A23

Year:
1990
File:
PDF, 186 KB
1990
52

Thick films of silicon nitride

Year:
1990
Language:
english
File:
PDF, 827 KB
english, 1990
53

Investigations of porous silicon for vapor sensing

Year:
1990
Language:
english
File:
PDF, 300 KB
english, 1990
54

A piezopolymer finger pulse and breathing wave sensor

Year:
1990
Language:
english
File:
PDF, 286 KB
english, 1990
55

A PVDF film sensor for material identification

Year:
1990
Language:
english
File:
PDF, 217 KB
english, 1990
56

How to liberate integrated sensors from encapsulation stress

Year:
1990
Language:
english
File:
PDF, 189 KB
english, 1990
59

An implantable pressure sensor for use in cardiology

Year:
1990
Language:
english
File:
PDF, 725 KB
english, 1990
63

Compatibility of zinc oxide with silicon IC processing

Year:
1990
Language:
english
File:
PDF, 623 KB
english, 1990
64

Edges and corners of multilayer dynamic microstructures

Year:
1990
Language:
english
File:
PDF, 2.39 MB
english, 1990
66

Mechanical design issues in laterally-driven microstructures

Year:
1990
Language:
english
File:
PDF, 764 KB
english, 1990
68

Sensitivity enhancement of evanescent wave integrated optic transducers

Year:
1990
Language:
english
File:
PDF, 278 KB
english, 1990
71

Subject index of volumes A21–A23

Year:
1990
Language:
english
File:
PDF, 709 KB
english, 1990
72

The mechanism of field-assisted silicon-glass Bonding

Year:
1990
Language:
english
File:
PDF, 404 KB
english, 1990