![](/img/cover-not-exists.png)
A sub-micron particle filter in silicon
Gjermund Kittilsland, Göran Stemme, Bengt NordénVolume:
23
Year:
1990
Language:
english
Pages:
4
DOI:
10.1016/0924-4247(90)87056-o
File:
PDF, 483 KB
english, 1990