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Field oxide microbridges, cantilever beams, coils and suspended membranes in SACMOS technology
D. Moser, M. Parameswaran, H. BaltesVolume:
23
Year:
1990
Language:
english
Pages:
4
DOI:
10.1016/0924-4247(90)87081-s
File:
PDF, 1.30 MB
english, 1990