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Low-temperature silicon wafer-to-wafer bonding using gold at eutectic temperature
R.F. Wolffenbuttel, K.D. WiseVolume:
43
Year:
1994
Language:
english
Pages:
7
DOI:
10.1016/0924-4247(93)00653-l
File:
PDF, 1.51 MB
english, 1994