Volume 43; Issue 1-3

Sensors and Actuators A: Physical

Volume 43; Issue 1-3

1

Fabrication of a magnetic transducer composed of a high-density array of microelectromagnets with on-chip electronics

F. Cardot, J. Gobet, M. Bogdanski, F. Rudolf

Journal:

Sensors and Actuators A: Physical

Year:

1994

Language:

english

File:

PDF, 1.88 MB

english, 1994

2

Low-temperature silicon wafer-to-wafer bonding using gold at eutectic temperature

R.F. Wolffenbuttel, K.D. Wise

Journal:

Sensors and Actuators A: Physical

Year:

1994

Language:

english

File:

PDF, 1.51 MB

english, 1994

3

Stiction of surface micromachined structures after rinsing and drying: model and investigation of adhesion mechanisms

Rob Legtenberg, Harrie A.C. Tilmans, Job Elders, Miko Elwenspoek

Journal:

Sensors and Actuators A: Physical

Year:

1994

Language:

english

File:

PDF, 1.24 MB

english, 1994

4

Application of porous silicon as a sacrificial layer

W. Lang, P. Steiner, A. Richter, K. Marusczyk, G. Weimann, H. Sandmaier

Journal:

Sensors and Actuators A: Physical

Year:

1994

Language:

english

File:

PDF, 1.95 MB

english, 1994

5

Developments in integrated smart sensors

Johan H. Huijsing, Frank R. Riedijk, Gert van der Horn

Journal:

Sensors and Actuators A: Physical

Year:

1994

Language:

english

File:

PDF, 3.07 MB

english, 1994

6

Control of the dynamic range and sensitivity of a surface plasmon resonance based fiber optic sensor

R.C. Jorgenson, S.S. Yee

Journal:

Sensors and Actuators A: Physical

Year:

1994

Language:

english

File:

PDF, 533 KB

english, 1994

7

A system for passive implantable pressure sensors

Lars Rosengren, Pelle Rangsten, Ylva Bäcklund, Bertil Hök, Björn Svedbergh, Göran Selén

Journal:

Sensors and Actuators A: Physical

Year:

1994

Language:

english

File:

PDF, 1.32 MB

english, 1994

8

Micromachined gyroscopes

Jan Söderkvist

Journal:

Sensors and Actuators A: Physical

Year:

1994

Language:

english

File:

PDF, 786 KB

english, 1994

9

A study of silicon angular rate sensors using anisotropic etching technology

K. Maenaka, T. Shiozawa

Journal:

Sensors and Actuators A: Physical

Year:

1994

Language:

english

File:

PDF, 1.02 MB

english, 1994

10

Study on fine patterning processes with a thick resist

Kenichiro Suzuki

Journal:

Sensors and Actuators A: Physical

Year:

1994

Language:

english

File:

PDF, 1.26 MB

english, 1994

11

Application of electrostatic feedback to critical damping of an integrated silicon capacitive accelerometer

R.P. van Kampen, M.J. Vellekoop, P.M. Sarro, R.F. Wolffenbuttel

Journal:

Sensors and Actuators A: Physical

Year:

1994

Language:

english

File:

PDF, 1.00 MB

english, 1994

12

A miniature high-sensitivity broad-band accelerometer based on electron tunneling transducers

Howard K. Rockstad, T.W. Kenny, J.K. Reynolds, W.J. Kaiser, Thomas B. Gabrielson

Journal:

Sensors and Actuators A: Physical

Year:

1994

Language:

english

File:

PDF, 1.02 MB

english, 1994

13

High sensitivity hall sensors with low thermal drift using AlGaAs/InGaAs/GaAs heterostructures

V. Mosser, S. Contreras, S. Aboulhouda, Ph. Lorenzini, F. Kobbi, J.L. Robert, K. Zekentes

Journal:

Sensors and Actuators A: Physical

Year:

1994

Language:

english

File:

PDF, 534 KB

english, 1994

14

Fabrication of CMOS IC for telemetering biological signals from multiple subjects

Jongdae Park, Segon Choi, Heedon Seo, Tetsuro Nakamura

Journal:

Sensors and Actuators A: Physical

Year:

1994

Language:

english

File:

PDF, 1.32 MB

english, 1994

15

On a sensor to detect the point just before the dozing off state is reached

M.Fujikake Funada, Y. Yazu, H. Ide, K. Idogawa, F. Yano, N. Daimon, S.P. Ninomija

Journal:

Sensors and Actuators A: Physical

Year:

1994

Language:

english

File:

PDF, 755 KB

english, 1994

16

SiC for sensors and high-temperature electronics

G. Müller, G. Krötz, E. Niemann

Journal:

Sensors and Actuators A: Physical

Year:

1994

Language:

english

File:

PDF, 1.72 MB

english, 1994

17

Light-emitting diodes in porous silicon

F. Kozlowski, P. Steiner, W. Lang, H. Sandmaier

Journal:

Sensors and Actuators A: Physical

Year:

1994

Language:

english

File:

PDF, 657 KB

english, 1994

18

Mechanical light modulator fabricated on a silicon chip using SIMOX technology

W.R. Wiszniewski, R.E. Collins, B.A. Pailthorpe

Journal:

Sensors and Actuators A: Physical

Year:

1994

Language:

english

File:

PDF, 1.05 MB

english, 1994

19

A piezoresistive humidity sensor

G. Gerlach, K. Sager

Journal:

Sensors and Actuators A: Physical

Year:

1994

Language:

english

File:

PDF, 368 KB

english, 1994

20

A silicon VLSI optical sensor for pattern recognition

William O. Camp, Jan Van der Spiegel

Journal:

Sensors and Actuators A: Physical

Year:

1994

Language:

english

File:

PDF, 798 KB

english, 1994

21

A monolithic sensor array of individually addressable microelectrodes

R. Kakerow, Y. Manoli, W. Mokwa, M. Rospert, H. Meyer, H. Drewer, J. Krause, K. Cammann

Journal:

Sensors and Actuators A: Physical

Year:

1994

Language:

english

File:

PDF, 939 KB

english, 1994

22

A micromachined pressure sensor with fiber-optic interferometric readout

M.A. Chan, S.D. Collins, R.L. Smith

Journal:

Sensors and Actuators A: Physical

Year:

1994

Language:

english

File:

PDF, 758 KB

english, 1994

23

Microfabricated surface plasmon sensing system

R. Garabedian, C. Gonzalez, J. Richards, A. Knoesen, R. Spencer, S.D. Collins, R.L. Smith

Journal:

Sensors and Actuators A: Physical

Year:

1994

Language:

english

File:

PDF, 1.05 MB

english, 1994

24

Mechanical and optical properties of surface micromachined torsional mirrors in silicon, polysilicon and aluminum

V.P. Jaecklin, C. Linder, J. Brugger, N.F. de Rooij, J.-M. Moret, R. Vuilleumier

Journal:

Sensors and Actuators A: Physical

Year:

1994

Language:

english

File:

PDF, 2.40 MB

english, 1994

25

Characterization of an inchworm prototype motor

M. Bexell, A.-L. Tiensuu, J.-Å. Schweitz, J. Söderkvist, S. Johansson

Journal:

Sensors and Actuators A: Physical

Year:

1994

Language:

english

File:

PDF, 1.14 MB

english, 1994

26

Microlever with combined integrated sensor/actuator functions for scanning force microscopy

J. Brugger, N. Blanc, Ph. Renaud, N.F. de Rooij

Journal:

Sensors and Actuators A: Physical

Year:

1994

Language:

english

File:

PDF, 818 KB

english, 1994

27

Accurate microscopic method to investigate the aging of micromachined silicon actuators

R.A. Buser, A. Dommann

Journal:

Sensors and Actuators A: Physical

Year:

1994

Language:

english

File:

PDF, 753 KB

english, 1994

28

Design and fabrication of an overhanging xy-microactuator with integrated tip for scanning surface profiling

P.-F. Indermuehle, C. Linder, J. Brugger, V.P. Jaecklin, N.F. de Rooij

Journal:

Sensors and Actuators A: Physical

Year:

1994

Language:

english

File:

PDF, 993 KB

english, 1994

29

Development of piezoelectric micromovement actuator fabrication using a thick-film double-paste printing method

H. Moilanen, J. Lappalainen, S. Leppävuori

Journal:

Sensors and Actuators A: Physical

Year:

1994

Language:

english

File:

PDF, 1001 KB

english, 1994

30

Continuous ink-jet print head utilizing silicon micromachined nozzles

L. Smith, A. Söderbärg, U. Björkengren

Journal:

Sensors and Actuators A: Physical

Year:

1994

Language:

english

File:

PDF, 1.47 MB

english, 1994

31

Bistable fluidic elements in LIGA technique for flow control in fluidic microactuators

J. Vollmer, H. Hein, W. Menz, F. Walter

Journal:

Sensors and Actuators A: Physical

Year:

1994

Language:

english

File:

PDF, 626 KB

english, 1994

32

Microrobot actuated by a vibration energy field

Takashi Yasuda, Isao Shimoyama, Hirofumi Miura

Journal:

Sensors and Actuators A: Physical

Year:

1994

Language:

english

File:

PDF, 986 KB

english, 1994

33

Integrated shielding lines on multilayer polysilicon resonators

M.-A. Grétillat, C. Linder, N.F. de Rooij

Journal:

Sensors and Actuators A: Physical

Year:

1994

Language:

english

File:

PDF, 2.15 MB

english, 1994

34

Electrodeposited electrostatic rigid-rotor wobble motors on silicon

L. Paratte, N.F. de Rooij

Journal:

Sensors and Actuators A: Physical

Year:

1994

Language:

english

File:

PDF, 1.19 MB

english, 1994

35

Papers from the 7th international conference on solid-state sensors and actuators (transducers '93), Yokohama, Japan, June 7–10, 1993

Journal:

Sensors and Actuators A: Physical

Year:

1994

Language:

english

File:

PDF, 67 KB

english, 1994

36

High temperature pressure sensor using double SOIstructure with two Al2O3 films

Young-Tae Lee, Heedon Seo, Makoto Ishida, Shoji Kawahito, Tetsuro Nakamura

Journal:

Sensors and Actuators A: Physical

Year:

1994

Language:

english

File:

PDF, 825 KB

english, 1994

37

Vacuum packaging for microsensors by glass-silicon anodic bonding

H. Henmi, S. Shoji, Y. Shoji, K. Yoshimi, M. Esashi

Journal:

Sensors and Actuators A: Physical

Year:

1994

Language:

english

File:

PDF, 531 KB

english, 1994

38

Conference calendar

Journal:

Sensors and Actuators A: Physical

Year:

1994

Language:

english

File:

PDF, 62 KB

english, 1994

39

Author index of volume A43

Journal:

Sensors and Actuators A: Physical

Year:

1994

File:

PDF, 79 KB

1994

40

Subject index of volume A43

Journal:

Sensors and Actuators A: Physical

Year:

1994

Language:

english

File:

PDF, 315 KB

english, 1994

41

Surface micromachined tuneable interferometer array

K. Aratani, P.J. French, P.M. Sarro, D. Poenar, R.F. Wolffenbuttel, S. Middelhoek

Journal:

Sensors and Actuators A: Physical

Year:

1994

Language:

english

File:

PDF, 1.01 MB

english, 1994

42

Liquid and gas micro-calorimeters for (bio)chemical measurements

A.W. van Herwaarden, P.M. Sarro, J.W. Gardner, P. Bataillard

Journal:

Sensors and Actuators A: Physical

Year:

1994

Language:

english

File:

PDF, 1.68 MB

english, 1994

43

A CMOS-compatible monolithic conductivity sensor with integrated electrodes

N. Kordas, Y. Manoli, W. Mokwa, M. Rospert

Journal:

Sensors and Actuators A: Physical

Year:

1994

Language:

english

File:

PDF, 956 KB

english, 1994

44

A love wave sensor for (bio)chemical sensing in liquids

G. Kovacs, M.J. Vellekoop, R. Haueis, G.W. Lubking, A. Venema

Journal:

Sensors and Actuators A: Physical

Year:

1994

Language:

english

File:

PDF, 695 KB

english, 1994

45

An optical sensor for the non-invasive measurement of the blood oxygen saturation of an artificial heart according to the variation of hematocrit

Kijin Kwon, Sekwang Park

Journal:

Sensors and Actuators A: Physical

Year:

1994

Language:

english

File:

PDF, 1.13 MB

english, 1994

46

Piezoelectric force sensor for scanning force microscopy

T. Itoh, T. Suga

Journal:

Sensors and Actuators A: Physical

Year:

1994

Language:

english

File:

PDF, 807 KB

english, 1994

47

Light-to-light transducer with detection of brightness difference

Susumu Noda, Kimitaka Shibata, Akio Sasaki

Journal:

Sensors and Actuators A: Physical

Year:

1994

Language:

english

File:

PDF, 612 KB

english, 1994

48

Optical system for pressure and temperature sensing

K. Seibert, D. Largeau, B. Bonvalot, D.T. Angelidis, P. Parsons

Journal:

Sensors and Actuators A: Physical

Year:

1994

Language:

english

File:

PDF, 1.39 MB

english, 1994

49

Fabrication and packaging of a resonant infrared sensor integrated in silicon

C. Cabuz, S. Shoji, K. Fukatsu, E. Cabuz, K. Minami, M. Esashi

Journal:

Sensors and Actuators A: Physical

Year:

1994

Language:

english

File:

PDF, 1.06 MB

english, 1994

50

Design optimisation of integrated microhotplates

N.R. Swart, A. Nathan

Journal:

Sensors and Actuators A: Physical

Year:

1994

Language:

english

File:

PDF, 1.10 MB

english, 1994

51

Buried piezoresistive sensors by means of MeV ion implantation

T. Nishimoto, S. Shoji, M. Esashi

Journal:

Sensors and Actuators A: Physical

Year:

1994

Language:

english

File:

PDF, 400 KB

english, 1994

52

Fabrication and characterization of a twin-mass accelerometer

Chr. Burrer, J. Esteve, J.A. Plaza, M. Bao, O. Ruiz, J. Samitier

Journal:

Sensors and Actuators A: Physical

Year:

1994

Language:

english

File:

PDF, 1.39 MB

english, 1994

53

A novel degree of freedom separation technique in a multi-axis accelerometer

K. Yamada, T. Kuriyama

Journal:

Sensors and Actuators A: Physical

Year:

1994

Language:

english

File:

PDF, 2.43 MB

english, 1994

54

A fluxgate magnetic sensor with micro-solenoids and electroplated permalloy cores

S. Kawahito, Y. Sasaki, H. Sato, T. Nakamura, Y. Tadokoro

Journal:

Sensors and Actuators A: Physical

Year:

1994

Language:

english

File:

PDF, 1.10 MB

english, 1994

55

Detection of actomyosin depolymerization by piezoelectric quartz crystal: Possibility for development of a meat-freshness sensor

Shigeru Kurosawa, Eiji Nemoto, Makoto Muratsugu, Hisami Ikeda, Minoru Yoshimoto, Yoshihito Mori, Hideo Kitajima, Naoki Kamo

Journal:

Sensors and Actuators A: Physical

Year:

1994

Language:

english

File:

PDF, 396 KB

english, 1994

56

Spectral response of a photodiode using 3C-SiC single crystalline film

Y. Hirabayashi, S. Karasawa, K. Kobayashi, S. Misawa, S. Yoshida

Journal:

Sensors and Actuators A: Physical

Year:

1994

Language:

english

File:

PDF, 614 KB

english, 1994

57

Evaluation of liquid properties using a silicon lamb wave sensor

M.J. Vellekoop, G.W. Lubking, P.M. Sarro, A. Venema

Journal:

Sensors and Actuators A: Physical

Year:

1994

Language:

english

File:

PDF, 903 KB

english, 1994

58

A thin film bolometer using porous silicon technology

W. Lang, P. Steiner, U. Schaber, A. Richter

Journal:

Sensors and Actuators A: Physical

Year:

1994

Language:

english

File:

PDF, 1.07 MB

english, 1994

59

AT-cut quartz resonators for determination of viscoelastic and dielectric properties of water/glycerol

Hong-Tao Sun, Liang-Ying Zhang, Xi Yao, Wojciech Wlodarski

Journal:

Sensors and Actuators A: Physical

Year:

1994

Language:

english

File:

PDF, 411 KB

english, 1994

60

A technique for measuring strain in layered structure media

Kohji Toda, Goro Sugizaki, Tadashi Takenaka, Koichiro Sakata

Journal:

Sensors and Actuators A: Physical

Year:

1994

Language:

english

File:

PDF, 386 KB

english, 1994

61

Enhanced mode detection for microwaves using a high-impedance YBCO-BiO composite superconductor

K. Niki, M. Kamino, K. Shimaoka, Y. Yoshisato, T. Ikemachi, S. Nakano

Journal:

Sensors and Actuators A: Physical

Year:

1994

Language:

english

File:

PDF, 1000 KB

english, 1994

62

Integrated flow-regulated silicon micropump

V. Gass, B.H. van der Schoot, S. Jeanneret, N.F. de Rooij

Journal:

Sensors and Actuators A: Physical

Year:

1994

Language:

english

File:

PDF, 968 KB

english, 1994

63

Surface micromachined pressure sensors with integrated CMOS read-out electronics

H. Dudaicevs, M. Kandler, Y. Manoli, W. Mokwa, E. Spiegel

Journal:

Sensors and Actuators A: Physical

Year:

1994

Language:

english

File:

PDF, 1.18 MB

english, 1994

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