Mechanical light modulator fabricated on a silicon chip using SIMOX technology
W.R. Wiszniewski, R.E. Collins, B.A. PailthorpeVolume:
43
Year:
1994
Language:
english
Pages:
5
DOI:
10.1016/0924-4247(93)00688-z
File:
PDF, 1.05 MB
english, 1994