A micromachined pressure sensor with fiber-optic...

Sensors and Actuators A: Physical 1994 Vol. 43; Iss. 1-3

A micromachined pressure sensor with fiber-optic interferometric readout

M.A. Chan, S.D. Collins, R.L. Smith
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Volume:
43
Year:
1994
Language:
english
Pages:
6
DOI:
10.1016/0924-4247(93)00694-y
File:
PDF, 758 KB
english, 1994
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