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Microlever with combined integrated sensor/actuator functions for scanning force microscopy
J. Brugger, N. Blanc, Ph. Renaud, N.F. de RooijVolume:
43
Year:
1994
Language:
english
Pages:
7
DOI:
10.1016/0924-4247(93)00701-5
File:
PDF, 818 KB
english, 1994