Integrated shielding lines on multilayer polysilicon resonators
M.-A. Grétillat, C. Linder, N.F. de RooijVolume:
43
Year:
1994
Language:
english
Pages:
6
DOI:
10.1016/0924-4247(93)00710-l
File:
PDF, 2.15 MB
english, 1994