Long-term stability of silicon bridge oscillators...

Sensors and Actuators A: Physical 1995 Vol. 46; Iss. 1-3

Long-term stability of silicon bridge oscillators fabricated using the boron etch stop

Andrew Pember, Jim Smith, Henri Kemhadjian
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Volume:
46
Year:
1995
Pages:
7
DOI:
10.1016/0924-4247(94)00860-k
File:
PDF, 669 KB
1995
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