Volume 46; Issue 1-3

Sensors and Actuators A: Physical

Volume 46; Issue 1-3

1

Microsystems - the European approach

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 654 KB

1995

2

The use of ion implantation for micromachining GaAs for sensor applications

J. Miao, H.L. Hartnagel, D. Rück, K. Fricke

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 513 KB

1995

3

Static and dynamic characterization of Si membranes

V. Lange, G. Higelin

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 299 KB

1995

4

Long-term stability of silicon bridge oscillators fabricated using the boron etch stop

Andrew Pember, Jim Smith, Henri Kemhadjian

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 669 KB

1995

5

Ultrasonic measurements with micromembranes

M.W. Börner, S. zur Horst-Meyer, M.C. Murphy, H.-J. Münch, W.K. Schomburg, M. Vitt

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 256 KB

1995

6

Fabrication of electrode arrays in the quarter micron regime for biotechnological applications

K. Reimer, C. Köhler, T. Lisec, U. Schnakenberg, G. Fuhr, R. Hintsche, B. Wagner

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 528 KB

1995

7

First steps towards the fabrication of electrostatic micromotors using SOG

V. Conédéra, N. Fabre, H. Camon, B. Rousset, H.H. Pham, C. Solano

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 417 KB

1995

8

Polymeric sensing films: new horizons in sensorics?

Gábor Harsányi

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 363 KB

1995

9

Microfabrication of complex surface topographies using grey-tone lithography

B. Wagner, H.J. Quenzer, W. Henke, W. Hoppe, W. Pilz

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 1.03 MB

1995

10

Spin deposition of polymers over holes and cavities

Håkan Elderstig, Per Wallgren

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 230 KB

1995

11

Magnetically driven microstructures fabricated with multilayer electroplating

B. Löchel, A. Maciossek, H.-J. Quenzer, B. Wagner, G. Engelmann

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 738 KB

1995

12

Excimer laser ablation of PZT thin films on silicon cantilever beams

Jyrki Lappalainen, Johannes Frantti, Hannu Moilanen, Seppo Leppävuori

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 474 KB

1995

13

Selection of glass, anodic bonding conditions and material compatibility for silicon-glass capacitive sensors

T. Rogers, J. Kowal

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 798 KB

1995

14

A surface micromachined capacitive absolute pressure sensor array on a glass substrate

M. Habibi, E. Lueder, T. Kallfass, D. Horst

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 282 KB

1995

15

A new micromachined silicon high-accuracy pressure sensor

Jacques Mandle, Olivier Lefort, André Migeon

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 312 KB

1995

16

A technology for the monolithic fabrication of a pressure sensor and related circuitry

C. Cané, F. Campabadal, J. Esteve, M. Lozano, A. Götz, J. Santander, Ch. Burrer, J.A. Plaza, L. Pahun, S. Marco

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 409 KB

1995

17

Novel fully CMOS-compatible vacuum sensor

Oliver Paul, Henry Baltes

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 377 KB

1995

18

Evaluation of the fabrication of pressure sensors using bulk micromachining before IC processing

M.A. de Samber, T.P.L. Ho-Tran

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 539 KB

1995

19

Low pressure acoustic sensors for airborne sound with piezoresistive monocrystalline silicon and electrochemically etched diaphragms

R. Schellin, M. Strecker, U. Nothelfer, G. Schuster

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 394 KB

1995

20

High-temperature polysilicon pressure microsensor

I. Obieta, E. Castaño, F.J. Gracia

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 371 KB

1995

21

Piezoresistance of boron-doped PECVD and LPCVD polycrystalline silicon films

M. Le Berre, M. Lemiti, D. Barbier, P. Pinard, J. Cali, E. Bustarret, J. Sicart, J.L. Robert

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 358 KB

1995

22

Ambient humidity and moisture — a decisive failure source in piezoresistive sensors

Karsten Sager, Gerald Gerlach, Arne Nakladal, Andreas Schroth

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 422 KB

1995

23

AlN/silicon Lamb-wave microsensors for pressure and gravimetric measurements

A. Choujaa, N. Tirole, C. Bonjour, G. Martin, D. Hauden, P. Blind, A. Cachard, C. Pommier

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 290 KB

1995

24

A novel resonant silicon accelerometer in bulk-micromachining technology

Chr. Burrer, J. Esteve

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 431 KB

1995

25

Airbag application: a microsystem including a silicon capacitive accelerometer, CMOS switched capacitor electronics and true self-test capability

L. Zimmermann, J.Ph. Ebersohl, F. Le Hung, J.P. Berry, F. Baillieu, P. Rey, B. Diem, S. Renard, P. Caillat

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 548 KB

1995

26

Silicon accelerometer based on thermopiles

U.A. Dauderstädt, P.H.S. de Vries, R. Hiratsuka, P.M. Sarro

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 316 KB

1995

27

Performance limitations of surface-machined accelerometers fabricated in polysilicon gate material

M.C.L. Ward, D.O. King, A.M. Hodge

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 438 KB

1995

28

Thin film strain gauges on polymers: main characteristics

H. Grange, C. Maeder, C. Bieth, S. Renard, G. Delapierre

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 331 KB

1995

29

Characterization of tantalum oxynitride thin films as high-temperature strain gauges

I. Ayerdi, E. Castaño, A. García-Alonso, F.J. Gracia

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 269 KB

1995

30

Design of a ring-shaped three-axis micro force/torque sensor

Dirk Diddens, Dominiek Reynaerts, Hendrik Van Brussel

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 671 KB

1995

31

Micro-scale force-transducer system to quantify isolated heart cell contractile characteristics

Gisela Lin, Kristofer S.J. Pister, Kenneth P. Roos

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 410 KB

1995

32

Telemetric sensors by microwave interferometry

A. Benlarbi-Delaï, J.P. Covillers, Y. Leroy

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 358 KB

1995

33

A microwave powered data transponder

Bernhard Obrist, Stefan Hegnauer

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 248 KB

1995

34

A CMOS/CCD image sensor for 2D real time motion estimation

Massimo Gottardi

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 416 KB

1995

35

Magneto-optical position-resolving sensor for displacement measurements between light beams

Martin Gaugitsch, Johann Hochreiter, Fritz Haberl, Hans Hauser

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 301 KB

1995

36

Magnetoresistive thick film sensor for linear displacements

B. Morten, G. De Cicco, M. Prudenziati, A. Masoero, G. Mihai

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 447 KB

1995

37

Finite-element modelling as a tool for designing capacitive position sensors

M.H.W. Bonse, C. Mul, J.W. Spronck

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 349 KB

1995

38

Magnetic sensors continue to advance towards perfection

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 651 KB

1995

39

Micromachined magnetotransistors

R. Castagnetti, M. Schneider, H. Baltes

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 383 KB

1995

40

High-sensitivity Hall sensors using GaInAs/AlInAs pseudomorphic heterostructures

S. Del Medico, T. Benyattou, G. Guillot, M. Gendry, M. Oustric, T. Venet, J. Tardy, G. Hollinger, A. Chovet, N. Mathieu

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 269 KB

1995

41

Signal processing for magnetic micro torque sensors

Dirk Killat, Werner Langheinrich

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 328 KB

1995

42

Inclination sensoring and magnetic signal transmission for trench wall constructions

Hans Hauser, Karl Vorlicek

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 339 KB

1995

43

SOI 'SIMOX'; from bulk to surface micromachining, a new age for silicon sensors and actuators

B. Diem, P. Rey, S. Renard, S. Viollet Bosson, H. Bono, F. Michel, M.T. Delaye, G. Delapierre

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 1023 KB

1995

44

Deep and fast plasma etching for silicon micromachining

M. Francou, J.S. Danel, L. Peccoud

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 383 KB

1995

45

Electrochemical etch-stop characteristics of TMAH:IPA solutions

M.C. Acero, J. Esteve, Chr. Burrer, A. Götz

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 528 KB

1995

46

Atomic scale simulation of silicon etched in aqueous KOH solution

H. Camon, Z. Moktadir

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 307 KB

1995

47

Anisotropic etching of germanium

Ralu Leancu, N. Moldovan, L. Csepregi, W. Lang

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 276 KB

1995

48

Thin membranes with optimized thermomechanical properties for microsystem applications

I. George, P. Cemeli, B. Bonvalot, M. Wagener, A. Girard, A. Zarudiansky, J. Suski

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 387 KB

1995

49

Porous silicon membranes for gas-sensor applications

T. Taliercio, M. Dilhan, E. Massone, A. Foucaran, A.M. Gué, T. Bretagnon, B. Fraisse, L. Montès

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 282 KB

1995

50

Transfer function determination of micromechanical structures using a time domain analysis and resonance method

C. Rubio, J. Samitier, O. Ruiz, M.A. Benítez, E. Montané, J.M. López-Villegas, J.R. Morante

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 263 KB

1995

51

Electrical characterization of SiC for high-temperature thermal-sensor applications

C. Dezauzier, N. Becourt, G. Arnaud, S. Contreras, J.L. Ponthenier, J. Camassel, J.L. Robert, J. Pascual, C. Jaussaud

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 381 KB

1995

52

Rapid thermal processing of piezoresistive polycrystalline silicon films: An innovative technology for low cost pressure sensor fabrication

B. Semmache, P. Kleimann, M. Le Berre, M. Lemiti, D. Barbier, P. Pinard

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 584 KB

1995

53

Influence of the bonding conditions on the response of capacitive pressure sensors

X. Chauffleur, G. Blasquez, P. Pons

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 330 KB

1995

54

A monolithically integrated sensor system using sensor-specific CMOS cells

J. Weber, S. Seitz, U. Steger, B. Folkmer, U. Schaber, A. Plettner, H.L. Offereins, H. Sandmeier, E. Lindner

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 754 KB

1995

55

Small piezoresistive silicon microphones specially designed for the characterization of turbulent gas flows

Edvard Kälvesten, Lennart Löfdahl, Göran Stemme

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 455 KB

1995

56

A piezoelectric bimorph static pressure sensor

G. Caliano, N. Lamberti, A. Iula, M. Pappalardo

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 252 KB

1995

57

High-precision readout circuit for LIGA acceleration sensors

O. Krömer, O. Fromhein, H. Gemmeke, T. Kühner, J. Mohr, M. Strohrmann

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 346 KB

1995

58

Thick-film weldable strain gauges

L. Fraigi, L. Malatto

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 247 KB

1995

59

A 2D photosensor array with integrated charge amplifier

Alvise Sartori, Franco Maloberti, Andrea Simoni, Guido Torelli

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 362 KB

1995

60

Full three-dimensional numerical analysis of multi-collector magnetotransistors with directional sensitivity

C. Riccobene, K. Gärtner, G. Wachutka, H. Baltes, W. Fichtner

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 502 KB

1995

61

Modelling of a micromachined torque sensor

Pirmin Rombach, Werner Langheinrich

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 386 KB

1995

62

Photolithographic structuring of giant magnetoresistive CoCu multilayers

W. Bartsch, G. Rupp, W. Schelter

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 426 KB

1995

63

A.c. magnetic-field measurement using the fluxgate

P. Ripka, F. Primdahl, O.V. Nielsen, J.R. Petersen, A. Ranta

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 410 KB

1995

64

An absolute cryogenic magnetometer

F. Ayela, J.L. Bret, J. Chaussy

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 182 KB

1995

65

A magnetic sensor with current-controlled sensitivity and resolution

P. Malcovati, R. Castagnetti, F. Maloberti, H. Baltes

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 461 KB

1995

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