Magnetically driven microstructures fabricated with multilayer electroplating
B. Löchel, A. Maciossek, H.-J. Quenzer, B. Wagner, G. EngelmannVolume:
46
Year:
1995
Pages:
6
DOI:
10.1016/0924-4247(94)00870-n
File:
PDF, 738 KB
1995