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A technology for the monolithic fabrication of a pressure sensor and related circuitry
C. Cané, F. Campabadal, J. Esteve, M. Lozano, A. Götz, J. Santander, Ch. Burrer, J.A. Plaza, L. Pahun, S. MarcoVolume:
46
Year:
1995
Pages:
4
DOI:
10.1016/0924-4247(94)00876-j
File:
PDF, 409 KB
1995