AlN/silicon Lamb-wave microsensors for pressure and...

Sensors and Actuators A: Physical 1995 Vol. 46; Iss. 1-3

AlN/silicon Lamb-wave microsensors for pressure and gravimetric measurements

A. Choujaa, N. Tirole, C. Bonjour, G. Martin, D. Hauden, P. Blind, A. Cachard, C. Pommier
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Volume:
46
Year:
1995
Pages:
4
DOI:
10.1016/0924-4247(94)00886-m
File:
PDF, 290 KB
1995
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