High temperature pressure sensor using double SOIstructure with two Al2O3 films
Young-Tae Lee, Heedon Seo, Makoto Ishida, Shoji Kawahito, Tetsuro NakamuraVolume:
43
Year:
1994
Language:
english
Pages:
6
DOI:
10.1016/0924-4247(94)80001-4
File:
PDF, 825 KB
english, 1994