Fabrication of a silicon micromachined capacitive...

Sensors and Actuators A: Physical 1996 Vol. 53; Iss. 1-3

Fabrication of a silicon micromachined capacitive microphone using a dry-etch process

Y.B Ning, A.W Mitchell, R.N Tait
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Volume:
53
Year:
1996
Language:
english
Pages:
6
DOI:
10.1016/0924-4247(96)01130-2
File:
PDF, 581 KB
english, 1996
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