Volume 53; Issue 1-3

Sensors and Actuators A: Physical

Volume 53; Issue 1-3

1

A miniature, high-sensitivity, electron tunneling accelerometer

Howard K Rockstad, T.K Tang, J.K Reynolds, T.W Kenny, W.J Kaiser, Thomas B Gabrielson

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 499 KB

english, 1996

2

Fabrication of a silicon micromachined capacitive microphone using a dry-etch process

Y.B Ning, A.W Mitchell, R.N Tait

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 581 KB

english, 1996

3

Humidity-dependent mechanical properties of polyimide films and their use for IC-compatible humidity sensors

Karsten Sager, Andreas Schroth, Arne Nakladal, Gerald Gerlach

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 475 KB

english, 1996

4

Sealed-cavity resonant microbeam accelerometer

D.W Burns, R.D Horning, W.R Herb, J.D Zook, H Guckel

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 763 KB

english, 1996

5

Electromagnetic linear actuators with inductive position sensing

H Guckel, T Earles, J Klein, J.D Zook, T Ohnstein

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 713 KB

english, 1996

6

Magnetic microactuation of torsional polysilicon structures

Jack W Judy, Richard S Muller

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 570 KB

english, 1996

7

Piezoelectric actuation of PZT thin-film diaphragms at static and resonant conditions

P Muralt, A Kholkin, M Kohli, T Maeder

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 619 KB

english, 1996

8

Verification of the micromechanical characteristics of electrostatic linear actuators

M Kohl, J Göttert, J Mohr

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 681 KB

english, 1996

9

Design and fabrication of a gripping tool for micromanipulation

Greger Thornell, Mats Bexell, Jan-Åke Schweitz, Stefan Johansson

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 866 KB

english, 1996

10

A new etching method for single-crystal Al2O3 film on Si using Si ion implantation

Makoto Ishida, Hoon Kim, Takayuki Kimura, Tetsuro Nakamura

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 533 KB

english, 1996

11

A double-sided capacitive miniaturized accelerometer based on photovoltaic etch-stop technique

Daniel Lapadatu, Michel De Cooman, Robert Puers

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 685 KB

english, 1996

12

A capacitive accelerometer using SDB-SOI structure

Yoshinori Matsumoto, Moritaka Iwakiri, Hidekazu Tanaka, Makoto Ishida, Tetsuro Nakamura

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 632 KB

english, 1996

13

A sensitive Pirani vacuum sensor and the electrothermal SPICE modelling

Bruce C.S Chou, Yeong-Maw Chen, Mang Ou-Yang, Jin-Shown Shie

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 430 KB

english, 1996

14

A microelectromechanics-based frequency-signature sensor

Dan Haronian, Noel C MacDonald

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 1.07 MB

english, 1996

15

Fabrication of microlenses by plasmaless isotropic etching combined with plastic moulding

U Köhler, A.E Guber, W Bier, M Heckele

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 443 KB

english, 1996

16

Low-cost technology for multilayer electroplated parts using laminated dry film resist

Hubert Lorenz, Lionel Paratte, Roland Luthier, Nicolaas F de Rooij, Philippe Renaud

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 525 KB

english, 1996

17

Microsensor for the preventive detection of water condensation: operating principle and interface electronics

O Vancauwenberghe, J Short, E Giehler, P Bildstein, P Ancey, M Gschwind

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 436 KB

english, 1996

18

Quality factor of torsional resonators in the low-pressure region

Zsolt Kádár, Wilko Kindt, Andre Bossche, Jeff Mollinger

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 374 KB

english, 1996

19

Thin-film boron-doped polycrystalline silicon70%-germanium30% for thermopiles

P Van Gerwen, T Slater, J.B Chévrier, K Baert, R Mertens

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 401 KB

english, 1996

20

Alignment of mask patterns to crystal orientation

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 555 KB

english, 1996

21

Instabilities in the piezoelectric properties of ferroelectric ceramics

D Damjanovic, M Demartin, H.S Shulman, M Testorf, N Setter

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 756 KB

english, 1996

22

Extensions of the quartz-crystal-microbalance technique

V.M Mecea, J.O Carlsson, R.V Bucur

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 668 KB

english, 1996

23

Static and dynamic flow simulation of a KOH-etched microvalve using the finite-element method

J Ulrich, R Zengerle

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 589 KB

english, 1996

24

A micromachined single-chip inkjet printhead

P Krause, E Obermeier, W Wehl

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 862 KB

english, 1996

25

Tactile microgripper for automated handling of microparts

Georg Greitmann, Rudolf A Buser

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 693 KB

english, 1996

26

Thermomechanical characteristics of a thermal switch

T Slater, P Van Gerwen, E Masure, F Preud'homme, K Baert

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 430 KB

english, 1996

27

Editorial Board

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 39 KB

english, 1996

28

A novel image storage sensor using photostimulated luminescence in SrS:Eu,Sm phosphor for electromagnetic waves such as X-rays, UV-rays and visible light

Hidehito Nanto, Yoshiaki Hirai, Mitsuo Ikeda, Mitsuteru Kadota, Jun-ichi Nishishita, Shouichi Nasu, Yoshiteru Douguchi

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 303 KB

english, 1996

29

Design of a silicon microphone with differential read-out of a sealed double parallel-plate capacitor

Jesper Bay, Ole Hansen, Siebe Bouwstra

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 402 KB

english, 1996

30

On the mass sensitivity of acoustic-plate-mode sensors

Fabien Josse, Reiner Dahint, Jürgen Schumacher, Michael Grunze, Jeffrey C Andle, John F Vetelino

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 524 KB

english, 1996

31

Sputter deposition of TiNi, TiNiPd and TiPd films displaying the two-way shape-memory effect

E Quandt, C Halene, H Holleck, K Feit, M Kohl, P Schloβmacher, A Skokan, K.D Skrobanck

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 759 KB

english, 1996

32

Magnetic sensors for nanotesla detection using planar Hall effect

F Nguyen Van Dau, A Schuhl, J.R Childress, M Sussiau

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 459 KB

english, 1996

33

A CMOS-compatible 2-D vertical Hall magnetic-field sensor using active carrier confinement and post-process micromachining

M Paranjape, L.M Landsberger, Mojtaba Kahrizi

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 711 KB

english, 1996

34

Generating a microplasma with porous silicon

F Kozlowski, B Huber, P Steiner, W Lang

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 449 KB

english, 1996

35

Micromachined 1 × 2 optical-fiber switch

Leslie A Field, Diane L Burriesci, Peter R Robrish, Richard C Ruby

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 566 KB

english, 1996

36

New effects in electroactive polymers: new basics for sensors

A.N Lachinov, A.Yu Zherebov, V.M Kornilov

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 477 KB

english, 1996

37

pH-controlled TMAH etchants for silicon micromachining

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 374 KB

english, 1996

38

New method for testing hermeticity of silicon sensor structures

Martin Nese, Ralph W Bernstein, Ib-Rune Johansen, Rudie Spooren

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 382 KB

english, 1996

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