Uniform groove-depths in (110) Si anisotropic etching by...

Uniform groove-depths in (110) Si anisotropic etching by ultrasonic waves and application to accelerometer fabrication

K. Ohwada, Y. Negoro, Y. Konaka, T. Oguchi
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
50
Year:
1995
Pages:
6
DOI:
10.1016/0924-4247(96)80090-2
File:
PDF, 692 KB
1995
Conversion to is in progress
Conversion to is failed