Volume 50; Issue 1-2

Sensors and Actuators A: Physical

Volume 50; Issue 1-2

1

High-precision BESOI-based resonant accelerometer

Chr. Burrer, J. Esteve

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 519 KB

1995

2

Interaction elimination for multicomponent strain-gauge dynamometers

Wenlin Jin, P.K. Venuvinod

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 393 KB

1995

3

A new optical-fiber sensor for measuring surface pressure of Langmuir monolayers

Rong Zhu, Yu Wei, Bernhard Scholl, Hans J. Schmitt

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 291 KB

1995

4

Closed-form expressions for the relationships between stress, diaphragm deflection, and resistance change with pressure in silicon piezoresistive pressure sensors

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 395 KB

1995

5

Fabrication of free-standing microtransducers in GaAs with an electron-beam-induced oxide mask and Cl2 etching

P.C. Hoyle, J.R.A. Cleaver, H. Ahmed

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 854 KB

1995

6

An optical-fibre ellipsometer for applications in thin-film sensor systems

R. Chitaree, K. Weir, V. Murphy, A.W. Palmer, K.T.V. Grattan, B.D. MacCraith

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 603 KB

1995

7

A silicon force sensor for robotics and medicine

David J. Beebe, Arthur S. Hsieh, Denice D. Denton, Robert G. Radwin

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 1017 KB

1995

8

Surface acoustic wave atomizer

Minoru Kurosawa, Takayuki Watanabe, Akira Futami, Toshiro Higuchi

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 533 KB

1995

9

An ultrasonic micromotor using a bending cylindrical transducer based on PZT thin film

Takeshi Morita, Minoru Kurosawa, Toshiro Higuchi

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 465 KB

1995

10

A bidirectional silicon micropump

R. Zengerle, J. Ulrich, S. Kluge, M. Richter, A. Richter

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 474 KB

1995

11

Uniform groove-depths in (110) Si anisotropic etching by ultrasonic waves and application to accelerometer fabrication

K. Ohwada, Y. Negoro, Y. Konaka, T. Oguchi

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 692 KB

1995

12

Bulk silicon microelectromechanical devices fabricated from commercial bonded and etched-back silicon-on-insulator substrates

A. Benitez, J. Esteve, J. Bausells

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 421 KB

1995

13

Low-temperature silicon direct bonding and interface behaviours

Jiwei Jiao, Deren Lu, Bin Xiong, Weiyuan Wang

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 413 KB

1995

14

A skew-symmetric cantilever accelerometer for automotive airbag applications

Kyu Hyun Kim, Jong Soo Ko, Young-Ho Cho, Kwyro Lee, Byung Man Kwak, Kwanhum Park

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 547 KB

1995

15

Working principle and performance of the dynamic micropump

Torsten Gerlach, Helmut Wurmus

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 501 KB

1995

16

Design for manufacture of micromachined fabry—pérot cavity-based sensors

Youngmin Kim, Dean P. Neikirk

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 470 KB

1995

17

Active vibration control and actuation of a small cantilever for applications in scanning probe instruments

M.J. Cunningham, D.F.L. Jenkins, W.W. Clegg, M.M. Bakush

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 317 KB

1995

18

Fabrication and dynamic testing of electrostatic actuators with p+ silicon diaphragms

E.H. Yang, S.S. Yang, S.W. Han, S.Y. Kim

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 602 KB

1995

19

Resonator-based touch-sensitive probe

S.M. Harb, M. Vidic

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 486 KB

1995

20

Cryogenic sensors from semiconducting barium titanate ceramics with strong negative temperature coefficient of resistance

P. Padmini, N.S. Hari, T.R.N. Kutty

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 495 KB

1995

21

Variable-entrance-slit system for precision spectrophotometers

R. Vuilleumier, K. Kraiczek

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 522 KB

1995

22

Fabrication and simulation of magnetostrictive thin-film actuators

E. Quandt, K. Seemann

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 318 KB

1995

23

A micromachined vibrating gyroscope

K. Tanaka, Y. Mochida, M. Sugimoto, K. Moriya, T. Hasegawa, K. Atsuchi, K. Ohwada

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 400 KB

1995

24

Micromachined free-space integrated micro-optics

M.C. Wu, L.-Y. Lin, S.-S. Lee, K.S.J. Pister

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 866 KB

1995

25

Conference calendar

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 32 KB

1995

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— Carlos María Domínguez

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