Fabrication of conical micropore structure on silicon...

Microelectronic Engineering 2015 / 02 Vol. 133

Fabrication of conical micropore structure on silicon nitride/silicon using focused ion beam milling for biosensor application

Ariffin, Nur Hamizah Zainal, Yahaya, Hafizal, Shinano, Shunji, Tanaka, Satoru, Hashim, Abdul Manaf
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Volume:
133
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2014.11.011
Date:
February, 2015
File:
PDF, 1.16 MB
english, 2015
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