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Volume 133
Main
Microelectronic Engineering
Volume 133
Microelectronic Engineering
Volume 133
1
Fabrication of conical micropore structure on silicon nitride/silicon using focused ion beam milling for biosensor application
Ariffin, Nur Hamizah Zainal
,
Yahaya, Hafizal
,
Shinano, Shunji
,
Tanaka, Satoru
,
Hashim, Abdul Manaf
Journal:
Microelectronic Engineering
Year:
2015
Language:
english
File:
PDF, 1.16 MB
Your tags:
english, 2015
2
High resolution optical lithography or high throughput electron beam lithography: The technical struggle from the micro to the nano-fabrication evolution
Okazaki, Shinji
Journal:
Microelectronic Engineering
Year:
2015
Language:
english
File:
PDF, 2.61 MB
Your tags:
english, 2015
3
Effects of carbon pre-germanidation implant into Ge on the thermal stability of NiGe films
Liu, Qingbo
,
Wang, Guilei
,
Guo, Yiluan
,
Ke, Xingxing
,
Radamson, Henry
,
Liu, Hong
,
Zhao, Chao
,
Luo, Jun
Journal:
Microelectronic Engineering
Year:
2015
Language:
english
File:
PDF, 1.46 MB
Your tags:
english, 2015
4
A plasma processing combined with trench isolation technology for large opening of parylene based high-aspect-ratio microstructures
Kuo, Wen-Cheng
,
Liu, Chih-Ming
Journal:
Microelectronic Engineering
Year:
2015
Language:
english
File:
PDF, 1.78 MB
Your tags:
english, 2015
5
Study of conductivity switching mechanism of CdSe/PVP nanocomposite for memory device application
Kaur, Ramneek
,
Tripathi, S.K.
Journal:
Microelectronic Engineering
Year:
2015
Language:
english
File:
PDF, 2.03 MB
Your tags:
english, 2015
6
Electrical impedance, electrochemistry, mechanical stiffness, and hardness tunability in glassy carbon MEMS μECoG electrodes
Kassegne, Sam
,
Vomero, Maria
,
Gavuglio, Roberto
,
Hirabayashi, Mieko
,
Özyilmaz, Emre
,
Nguyen, Sebastien
,
Rodriguez, Jesus
,
Özyilmaz, Eda
,
van Niekerk, Pieter
,
Khosla, Ajit
Journal:
Microelectronic Engineering
Year:
2015
Language:
english
File:
PDF, 2.40 MB
Your tags:
english, 2015
7
Study on resist performance of chemically amplified molecular resists based on cyclic oligomers
Yamamoto, Hiroki
,
Kudo, Hiroto
,
Kozawa, Takahiro
Journal:
Microelectronic Engineering
Year:
2015
Language:
english
File:
PDF, 1.50 MB
Your tags:
english, 2015
8
Ordered-standing nickel hydroxide microchannel arrays: Synthesis and application for highly sensitive non-enzymatic glucose sensors
Miao, Fengjuan
,
Tao, Bairui
,
Chu, Paul K.
Journal:
Microelectronic Engineering
Year:
2015
Language:
english
File:
PDF, 1.12 MB
Your tags:
english, 2015
9
Characterization of stable and transient cavitation in megasonically irradiated aqueous solutions
Balachandran, Rajesh
,
Zhao, Mingrui
,
Yam, Petrie
,
Zanelli, Claudio
,
Keswani, Manish
Journal:
Microelectronic Engineering
Year:
2015
Language:
english
File:
PDF, 2.01 MB
Your tags:
english, 2015
10
AFM study of charging of the Au–n-GaAs contact
Shmargunov, A.V.
,
Bozhkov, V.G.
,
Novikov, V.A.
Journal:
Microelectronic Engineering
Year:
2015
Language:
english
File:
PDF, 1.36 MB
Your tags:
english, 2015
11
Dependency analysis of line edge roughness in electron-beam lithography
Zhao, X.
,
Lee, S.-Y.
,
Choi, J.
,
Lee, S.-H.
,
Shin, I.-K.
,
Jeon, C.-U.
,
Kim, B.-G.
,
Cho, H.-K.
Journal:
Microelectronic Engineering
Year:
2015
Language:
english
File:
PDF, 1.36 MB
Your tags:
english, 2015
12
Realization and characterization of surface micromachined tunable band stop CSRR filter using MEMS bridges on silicon substrate
Pradhan, Buddhadev
,
Gupta, Bhaskar
Journal:
Microelectronic Engineering
Year:
2015
Language:
english
File:
PDF, 2.22 MB
Your tags:
english, 2015
13
Innovative UV nanoimprint lithography using a condensable alternative chlorofluorocarbon atmosphere
Matsui, Shinji
,
Hiroshima, Hiroshi
,
Hirai, Yoshihiko
,
Nakagawa, Masaru
Journal:
Microelectronic Engineering
Year:
2015
Language:
english
File:
PDF, 6.57 MB
Your tags:
english, 2015
14
Nanometer scale patterning of GaN using nanoimprint lithography and Inductively Coupled Plasma etching
Ekielski, M.
,
Juchniewicz, M.
,
Płuska, M.
,
Wzorek, M.
,
Kamińska, E.
,
Piotrowska, A.
Journal:
Microelectronic Engineering
Year:
2015
Language:
english
File:
PDF, 1.64 MB
Your tags:
english, 2015
15
Two dimensional simulation and modeling of the electrical characteristics of the a-SiC/c-Si(p) based, thyristor-like, switches
Dimitriadis, E.I.
,
Archontas, N.
,
Girginoudi, D.
,
Georgoulas, N.
Journal:
Microelectronic Engineering
Year:
2015
Language:
english
File:
PDF, 799 KB
Your tags:
english, 2015
16
Schottky barrier height engineering of Al contacts on Si by embedded Au nanoparticles
Gorji, Mohammad Saleh
,
Razak, Khairunisak Abdul
,
Cheong, Kuan Yew
Journal:
Microelectronic Engineering
Year:
2015
Language:
english
File:
PDF, 1.57 MB
Your tags:
english, 2015
17
Multilayer thin film capacitors by selective etching of Pt and Ru electrodes
Hamm, Steven C.
,
Currano, Luke
,
Gangopadhyay, Shubhra
Journal:
Microelectronic Engineering
Year:
2015
Language:
english
File:
PDF, 951 KB
Your tags:
english, 2015
18
Fabrication of nanostep for total internal reflection fluorescence microscopy to calibrate in water
Unno, Noriyuki
,
Maeda, Asao
,
Satake, Shin-ichi
,
Tsuji, Takahiro
,
Taniguchi, Jun
Journal:
Microelectronic Engineering
Year:
2015
Language:
english
File:
PDF, 2.09 MB
Your tags:
english, 2015
19
Enhancement of the charge trapping performances with HfAlO composite oxide thin films in SONOS-type nonvolatile memory
Lan, Xuexin
,
Gong, Changjie
,
Ou, Xin
,
Cao, Yanqiang
,
Sun, Chong
,
Chen, Yan
,
Xu, Bo
,
Xia, Yidong
,
Li, Aidong
,
Yin, Jiang
,
Liu, Zhiguo
Journal:
Microelectronic Engineering
Year:
2015
Language:
english
File:
PDF, 1.18 MB
Your tags:
english, 2015
20
Hot embossing and mechanical punching of biodegradable microcontainers for oral drug delivery
Petersen, Ritika Singh
,
Mahshid, Rasoul
,
Andersen, Nis Korsgaard
,
Keller, Stephan Sylvest
,
Hansen, Hans Nørgaard
,
Boisen, Anja
Journal:
Microelectronic Engineering
Year:
2015
Language:
english
File:
PDF, 1.32 MB
Your tags:
english, 2015
21
Inside Front Cover - Editorial Board
Journal:
Microelectronic Engineering
Year:
2015
Language:
english
File:
PDF, 29 KB
Your tags:
english, 2015
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