Formation of epitaxial CoSi[sub 2] spike in Co/Si[sub 3]N[sub 4]/Si(100) system and its crystallographic structure
Park, Ji-Soo, Sohn, Dong Kyun, Kim, Yeongcheol, Bae, Jong-Uk, Lee, Byung Hak, Byun, Jeong Soo, Kim, Jae JeongVolume:
73
Year:
1998
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.121703
File:
PDF, 717 KB
english, 1998