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Spectroscopic ellipsometry and Raman scattering study of the annealing behavior of Be-implanted GaAs
Chambon, P., Erman, M., Theeten, J. B., Prévot, B., Schwab, C.Volume:
45
Year:
1984
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.95231
File:
PDF, 457 KB
english, 1984