Efficiency and thermal stability of Pt gettering in crystalline Si
Cacciato, A., Camalleri, C. M., Franco, G., Raineri, V., Coffa, S.Volume:
80
Year:
1996
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.363381
File:
PDF, 500 KB
english, 1996