Effect of chelating agent on benzotriazole removal during...

Effect of chelating agent on benzotriazole removal during post copper chemical mechanical polishing cleaning

Miao, Yingxin, Wang, Shengli, Wang, Chenwei, Liu, Yuling, Sun, Mingbin, Chen, Yang
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Volume:
130
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2014.08.012
Date:
November, 2014
File:
PDF, 1.41 MB
english, 2014
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