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Volume 130
Main
Microelectronic Engineering
Volume 130
Microelectronic Engineering
Volume 130
1
Effect of pyrolysis temperature on the electrical, optical, structural, and morphological properties of ITO thin films prepared by a sol–gel spin coating process
Moradi-Haji Jafan, Mohsen
,
Zamani-Meymian, Mohammad-Reza
,
Rahimi, Rahmatollah
,
Rabbani, Mahboubeh
Journal:
Microelectronic Engineering
Year:
2014
Language:
english
File:
PDF, 2.14 MB
Your tags:
english, 2014
2
Comparative study of AlN dielectric films’ electrical properties for MEMS capacitive switches
Koutsoureli, M.
,
Adikimenakis, A.
,
Michalas, L.
,
Papandreou, E.
,
Stavrinidis, G.
,
Konstantinidis, G.
,
Georgakilas, A.
,
Papaioannou, G.
Journal:
Microelectronic Engineering
Year:
2014
Language:
english
File:
PDF, 1.21 MB
Your tags:
english, 2014
3
Electron beam lithography in thick negative tone chemically amplified resist: Controlling sidewall profile in deep trenches and channels
Sarkar, Mihir
,
Mohapatra, Y.N.
Journal:
Microelectronic Engineering
Year:
2014
Language:
english
File:
PDF, 2.03 MB
Your tags:
english, 2014
4
Effect of thermal annealing on electrical and structural properties of Ni/Au/n-GaN Schottky contacts
Akkaya, A.
,
Esmer, L.
,
Kantar, B. Boyarbay
,
Çetin, H.
,
Ayyıldız, E.
Journal:
Microelectronic Engineering
Year:
2014
Language:
english
File:
PDF, 1.24 MB
Your tags:
english, 2014
5
Reducing wrinkles and cracks of metal films on PDMS substrate by hexane extraction and oxygen plasma etching
Meng, Ying
,
Li, Zhen Bo
,
Chen, Xiang
,
Chen, Jia Pin
Journal:
Microelectronic Engineering
Year:
2014
Language:
english
File:
PDF, 954 KB
Your tags:
english, 2014
6
Phase-shift lithography for sub-wavelength patterns of varying aspect ratios
Klemm, Angeline
,
Lyle, Andrew
,
Klein, Todd
,
Harms, Jonathan
,
Wang, Jian-Ping
Journal:
Microelectronic Engineering
Year:
2014
Language:
english
File:
PDF, 1.67 MB
Your tags:
english, 2014
7
Stability of weakly alkaline barrier slurry with the high selectivity
Luan, Xiaodong
,
Liu, Yuling
,
Wang, Chenwei
,
Liu, Guilin
Journal:
Microelectronic Engineering
Year:
2014
Language:
english
File:
PDF, 2.15 MB
Your tags:
english, 2014
8
Photoemission study of the identification of Mn silicate barrier formation on carbon containing low-κ dielectrics
Bogan, J.
,
McCoy, A.P.
,
O’Connor, R.
,
Casey, P.
,
Byrne, C.
,
Hughes, G.
Journal:
Microelectronic Engineering
Year:
2014
Language:
english
File:
PDF, 1.61 MB
Your tags:
english, 2014
9
Oxide based two diodes–one resistor structure for bipolar RRAM crossbar array
Li, Yingtao
,
Hu, Xiaoyi
,
Li, Rongrong
,
Chen, Enzi
,
Gong, Qingchun
,
Tao, Chunlan
Journal:
Microelectronic Engineering
Year:
2014
Language:
english
File:
PDF, 936 KB
Your tags:
english, 2014
10
Laser interference-driven fabrication of regular inverted-pyramid texture on mono-crystalline Si
Yang, Bogeum
,
Lee, Myeongkyu
Journal:
Microelectronic Engineering
Year:
2014
Language:
english
File:
PDF, 1.77 MB
Your tags:
english, 2014
11
RF characterization of the substrate coupling noise between TSV and active devices in 3D integrated circuits
Bermond, C.
,
Brocard, M.
,
Lacrevaz, T.
,
Farcy, A.
,
Le Maître, P.
,
Leduc, P.
,
Ben Jamaa, H.
,
Chéramy, S.
,
Sillon, N.
,
Fléchet, B.
Journal:
Microelectronic Engineering
Year:
2014
Language:
english
File:
PDF, 2.24 MB
Your tags:
english, 2014
12
Effect of chelating agent on benzotriazole removal during post copper chemical mechanical polishing cleaning
Miao, Yingxin
,
Wang, Shengli
,
Wang, Chenwei
,
Liu, Yuling
,
Sun, Mingbin
,
Chen, Yang
Journal:
Microelectronic Engineering
Year:
2014
Language:
english
File:
PDF, 1.41 MB
Your tags:
english, 2014
13
Evaluations of KOH solution as an effective developer for chemical amplified resist UVIII
Shao, Jinhai
,
Zhang, Sichao
,
Liu, Jianpeng
,
Ma, Yaqi
,
Lu, Bing-Rui
,
Sun, Yan
,
Lu, W.
,
Taksatorn, Nit
,
Chen, Yifang
Journal:
Microelectronic Engineering
Year:
2014
Language:
english
File:
PDF, 906 KB
Your tags:
english, 2014
14
Role of ammonia and carbonates in scavenging hydroxyl radicals generated during megasonic irradiation of wafer cleaning solutions
Balachandran, Rajesh
,
Zhao, Mingrui
,
Dong, Bingfeng
,
Brown, Ian
,
Raghavan, Srini
,
Keswani, Manish
Journal:
Microelectronic Engineering
Year:
2014
Language:
english
File:
PDF, 1.01 MB
Your tags:
english, 2014
15
P3HT:PCBM blend based photo organic field effect transistor
Yasin, Muhammad
,
Tauqeer, T.
,
Karimov, Khasan S.
,
San, Sait E.
,
Kösemen, Arif
,
Yerli, Yusuf
,
Tunc, Ali Veysel
Journal:
Microelectronic Engineering
Year:
2014
Language:
english
File:
PDF, 1.21 MB
Your tags:
english, 2014
16
Inside Front Cover - Editorial Board
Journal:
Microelectronic Engineering
Year:
2014
Language:
english
File:
PDF, 29 KB
Your tags:
english, 2014
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