Effect of electron irradiation on morphological, compositional and electrical properties of nanocluster carbon thin films grown using room temperature based cathodic arc process for large area microelectronics
De, Shounak, Satyanarayana, B.S., Sanjeev, Ganesh, Ramakrishna, K., Mohan Rao, K., Pattabi, ManjunathaVolume:
54
Language:
english
Journal:
Microelectronics Reliability
DOI:
10.1016/j.microrel.2014.07.007
Date:
December, 2014
File:
PDF, 1.14 MB
english, 2014