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Erratum: ‘‘Tantalum nitride films as resistors on chemical vapor deposited diamond substrates’’ [J. Appl. Phys. 73, 5208 (1993)]
Katz, A., Pearton, S. J., Nakahara, S., Baiocchi, F. A., Lane, E., Kovalchick, J.Volume:
75
Year:
1994
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.357041
File:
PDF, 264 KB
english, 1994