Frequency Multiplexed MEMS Actuators and Switches

IEEE Electron Device Letters 2013 / 01 Vol. 34; Iss. 1

Frequency Multiplexed MEMS Actuators and Switches

Wang, Minfeng, Zhang, Yang, Li, G. P., Bachman, Mark
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Volume:
34
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/led.2012.2224312
Date:
January, 2013
File:
PDF, 611 KB
english, 2013
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