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High throughput grating qualification of directed...

Microelectronic Engineering 2014 / 07 Vol. 123

High throughput grating qualification of directed self-assembly patterns using optical metrology

Van Look, Lieve, Rincon Delgadillo, Paulina, Lee, Yu-tsung, Pollentier, Ivan, Gronheid, Roel, Cao, Yi, Lin, Guanyang, Nealey, Paul F.
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Volume:
123
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2014.08.008
Date:
July, 2014
File:
PDF, 1.22 MB
english, 2014
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