Structure and orientation of films prepared by reactive...

Journal of Applied Physics 1990 Vol. 68; Iss. 5

Structure and orientation of films prepared by reactive sputtering of Ni, Fe, and NiFe in Ar/N2 mixtures

Takamori, T., Shih, K. K., Dove, D. B., Nywening, R. W., Re, M. E.
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Volume:
68
Year:
1990
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.347176
File:
PDF, 633 KB
english, 1990
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