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Electrical impedance, electrochemistry, mechanical stiffness, and hardness tunability in glassy carbon MEMS μECoG electrodes
Kassegne, Sam, Vomero, Maria, Gavuglio, Roberto, Hirabayashi, Mieko, Özyilmaz, Emre, Nguyen, Sebastien, Rodriguez, Jesus, Özyilmaz, Eda, van Niekerk, Pieter, Khosla, AjitVolume:
133
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2014.11.013
Date:
February, 2015
File:
PDF, 2.40 MB
english, 2015