Mechanical Characterization of Polysilicon Through On-Chip...

Journal of Microelectromechanical Systems 2004 / 04 Vol. 13; Iss. 2

Mechanical Characterization of Polysilicon Through On-Chip Tensile Tests

Corigliano, A., DeMasi, B., Frangi, A., Comi, C., Villa, A., Marchi, M.
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Volume:
13
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2003.823221
Date:
April, 2004
File:
PDF, 1.59 MB
english, 2004
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