Titanium and carbon coimplantation into sintered α-SiC and...

Titanium and carbon coimplantation into sintered α-SiC and hot-pressed Si3N4

Bhattacharya, R. S., Rai, A. K., Williams, J. M.
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Volume:
65
Year:
1989
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.342924
File:
PDF, 625 KB
english, 1989
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