Effects of electron cyclotron resonance etching on the ambient (100) GaAs surface
Glembocki, O. J., Tuchman, J. A., Ko, K. K., Pang, S. W., Giordana, A., Kaplan, R., Stutz, C. E.Volume:
66
Year:
1995
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.114275
File:
PDF, 267 KB
english, 1995