Structural distortions of sputtered niobium nitride films

Journal of Applied Physics 1989 Vol. 65; Iss. 5

Structural distortions of sputtered niobium nitride films

Cukauskas, E. J., Qadri, S. B., Carter, W. L.
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Volume:
65
Year:
1989
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.342874
File:
PDF, 719 KB
english, 1989
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