Metallization proximity studies for copper spiral inductors...

IEEE Transactions on Semiconductor Manufacturing 2003 / 05 Vol. 16; Iss. 2

Metallization proximity studies for copper spiral inductors on silicon

Choon Beng Sia,, Kiat Seng Yeo,, Manh Anh Do,, Jian-Guo Ma,
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Volume:
16
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/tsm.2003.811574
Date:
May, 2003
File:
PDF, 748 KB
english, 2003
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