Volume 16; Issue 2

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IEEE Transactions on Semiconductor Manufacturing
Volume 16; Issue 2

IEEE Transactions on Semiconductor Manufacturing

Volume 16; Issue 2

1

Capacity planning under demand uncertainty for semiconductor manufacturing

Hood, S.J., Bermon, S., Barahona, F.

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2003

Language:

english

File:

PDF, 405 KB

english, 2003

2

Design and characterization of a high-precision resistor ladder test structure

Tuinhout, H.P., Hoogzaad, G., Vertregt, M., Roovers, R.L.J., Erdmann, C.

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2003

Language:

english

File:

PDF, 416 KB

english, 2003

3

Direct measurement of field transistor threshold voltages using inversion layer fed transistors in deep submicron processes

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2003

Language:

english

File:

PDF, 463 KB

english, 2003

4

Comparison of electrical and SEM CD measurements on binary and alternating aperture phase-shifting masks

Smith, S., McCallum, M., Walton, A.J., Tom, J., Stevenson, M., Lissimore, A.

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2003

Language:

english

File:

PDF, 830 KB

english, 2003

5

Extraction of the base and emitter resistances in bipolar transistors using an accurate base resistance model

Ingvarson, F., Linder, M., Jeppson, K.O.

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2003

Language:

english

File:

PDF, 310 KB

english, 2003

6

Computationally efficient modeling of wafer temperatures in a low-pressure chemical vapor deposition furnace

Qinghua He,, Qin, S.J., Toprac, A.J.

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2003

Language:

english

File:

PDF, 453 KB

english, 2003

7

Metallization proximity studies for copper spiral inductors on silicon

Choon Beng Sia,, Kiat Seng Yeo,, Manh Anh Do,, Jian-Guo Ma,

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2003

Language:

english

File:

PDF, 748 KB

english, 2003

8

Systems of multiple cluster tools: configuration, reliability, and performance

Lopez, M.J., Wood, S.C.

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2003

Language:

english

File:

PDF, 529 KB

english, 2003

9

Clustering of plasma nitridation and post anneal steps to improve thershold voltage repeatbility

Hegedus, A., Olsen, C.S., Kuan, N., Madok, J.

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2003

Language:

english

File:

PDF, 298 KB

english, 2003

10

Contrasting single-wafer and batch processing for memory devices

Weimer, R.A., Eppich, D.M., Beaman, K.L., Powell, D.C., Gonzalez, F.

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2003

Language:

english

File:

PDF, 839 KB

english, 2003

11

Temperature and stress distribution in the SOI structure during fabrication

Cher Ming Tan,, Zhenghao Gan,, Xiaofang Gao,

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2003

Language:

english

File:

PDF, 354 KB

english, 2003

12

Verification structures for transmission line pulse measurements

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2003

Language:

english

File:

PDF, 279 KB

english, 2003

13

Methodology on extracting compact layout rules for latchup prevention in deep-submicron bulk CMOS technology

Ming-Dou Ker,, Wen-Yu Lo,

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2003

Language:

english

File:

PDF, 3.10 MB

english, 2003

14

Single-wafer/mini-batch approach for fast cycle time in advanced 300-mm fab

Bonnin, O., Mercier, D., Levy, D., Henry, M., Pouilloux, I., Mastromatteo, E.

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2003

Language:

english

File:

PDF, 2.37 MB

english, 2003

15

Single-wafer process technology: enabling rapid SiGe BiCMOS development

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2003

Language:

english

File:

PDF, 470 KB

english, 2003

16

The impact of single-wafer processing on semiconductor manufacturing

Singh, R., Fakhruddin, M., Poole, K.F.

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2003

Language:

english

File:

PDF, 730 KB

english, 2003

17

Shop-floor scheduling of semiconductor wafer fabs: exploring the influence of technology, market, and performance objectives

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2003

Language:

english

File:

PDF, 450 KB

english, 2003

18

Simplification methods for accelerating simulation-based real-time scheduling in a semiconductor wafer fabrication facility

Yeong-Dae Kim,, Sang-Oh Shim,, Bum Choi,, Hark Hwang,

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2003

Language:

english

File:

PDF, 414 KB

english, 2003

19

Compact model development for a new nonvolatile memory cell architecture

O'Shea, M., Duane, R., McCarthy, D., McCarthy, K.G., Concannon, A., Mathewson, A.

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2003

Language:

english

File:

PDF, 392 KB

english, 2003

20

Improving the accuracy and efficiency of junction capacitance characterization: strategies for probing configuration and data set size

MacSweeney, D., McCarthy, K.G., Floyd, L., Duane, R., Hurley, P., Power, J.A., Kelly, S.C., Mathewson, A.

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2003

Language:

english

File:

PDF, 566 KB

english, 2003

21

Single-wafer polysilicon engineering for the improvement of over erase in a 0.18-μm floating-gate flash memory

Luoh, T., Tzung-Ting Han,, Yun-Chi Yang,, Kuang-Chao Chen,, Hsueh-Hao Shih,, Yaw-Lin Hwang,, Cheng-Chen Hsueh,, Chung, H., Pan, S., Chih-Yuan Lu,

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2003

Language:

english

File:

PDF, 2.13 MB

english, 2003

22

Analysis of energy process window of laser metal pad cut link structure

Joohan Lee,, Bernstein, J.B.

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2003

Language:

english

File:

PDF, 703 KB

english, 2003

23

Applications of single-wafer rapid-thermal processing to the manufacture of advanced flash memory

Kuang-Chao Chen,, Hsueh-Hao Shih,, Yaw-Lin Hwang,, Cheng-Chen Hsueh,, Chung, H., Pan, S., Chih-Yuan Lu,

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2003

Language:

english

File:

PDF, 1.18 MB

english, 2003

24

Test structures for referencing electrical linewidth measurements to silicon lattice parameters using hrtem

Allen, R.A., am Ende, B.A., Cresswell, M.W., Murabito, C.E., Headley, T.J., Guthrie, W.F., Linholm, L.W., Ellenwood, C.H., Bogardus, E.H.

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2003

Language:

english

File:

PDF, 1.12 MB

english, 2003

25

Process integration of single-wafer technology in a 300-mm fab, realizing drastic cycle time reduction with high yield and excellent reliability

Ikeda, S., Nemoto, K., Funabashi, M., Uchino, T., Yamamoto, H., Yabuoshi, N., Sasaki, Y., Komori, K., Suzuki, N., Nishihara, S., Sasabe, S., Koike, A.

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2003

Language:

english

File:

PDF, 1.60 MB

english, 2003

26

Test structures for analyzing proton radiation effects in bipolar technologies

Barnaby, H.J., Schrimpf, R.D., Galloway, K.F., Ball, D.R., Pease, R.L., Fouillat, P.

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2003

Language:

english

File:

PDF, 955 KB

english, 2003

27

Thermal stress analysis for rapid thermal processor

Ching-Kong Chao,, Shih-Yu Hung,, Cheng-Ching Yu,

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2003

Language:

english

File:

PDF, 412 KB

english, 2003