Low-Temperature ZnO TFTs Fabricated by Reactive Sputtering...

IEEE Transactions on Electron Devices 2012 / 09 Vol. 59; Iss. 9

Low-Temperature ZnO TFTs Fabricated by Reactive Sputtering of Metallic Zinc Target

Li, Shaojuan, Cai, Yong, Han, Dedong, Wang, Yi, Sun, Lei, Chan, Mansun, Zhang, Shengdong
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Volume:
59
Language:
english
Journal:
IEEE Transactions on Electron Devices
DOI:
10.1109/ted.2012.2205151
Date:
September, 2012
File:
PDF, 372 KB
english, 2012
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