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Mechanism and kinetics of tetrachlorosilane reactions in an argon-hydrogen microwave plasma
Mayo, N., Carmi, U., Rosenthal, I., Avni, R., Manory, R., Grill, A.Volume:
55
Year:
1984
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.333011
File:
PDF, 891 KB
english, 1984