Improved activation of Mg+ and As+ dual implants in GaAs by capless rapid thermal annealing
Masum Choudhury, A. N. M., Armiento, C. A.Volume:
50
Year:
1987
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.98170
File:
PDF, 561 KB
english, 1987