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Effects and behavior of arsenic during titanium silicidation by halogen lamp annealing
Okamoto, Tatsuo, Tsukamoto, Katsuhiro, Shimizu, Masahiro, Matsukawa, TakayukiVolume:
61
Year:
1987
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.338960
File:
PDF, 787 KB
english, 1987