![](/img/cover-not-exists.png)
Analysis and Characterization of Capacitance Variation Using Capacitance Measurement Array
Peiyong Zhang,, Chenhui Feng,, Huiyan Wang,, Wentao Shan,Volume:
27
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/tsm.2014.2313373
Date:
May, 2014
File:
PDF, 2.05 MB
english, 2014