Platinum silicide contacts to silicon by lift-off

Platinum silicide contacts to silicon by lift-off

Cohen, S. S., Bower, D. H., Brown, D. M., Norton, J. F.
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Volume:
55
Year:
1984
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.333039
File:
PDF, 811 KB
english, 1984
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