Novel diffusion control process using ultra thin buffer...

Integrated Ferroelectrics 2000 / 11 Vol. 31; Iss. 1-4

Novel diffusion control process using ultra thin buffer layer for MFIS memory

Otsuka, Takashi, Ueda, Michihito, Nishikawa, Takashi, Iijima, Kenji, Morita, Kiyoyuki
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Volume:
31
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584580008215646
Date:
November, 2000
File:
PDF, 635 KB
english, 2000
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