Self-aligned passivation on copper interconnection durability against oxidizing ambient annealing
Itow, Hitoshi, Nakasaki, Yasushi, Minamihaba, Gaku, Suguro, Kyoichi, Okano, HaruoVolume:
63
Year:
1993
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.109849
File:
PDF, 508 KB
english, 1993