Laser-induced vapor deposition of silicon

Laser-induced vapor deposition of silicon

Hanabusa, M., Namiki, Akira, Yoshihara, Keitaro
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Volume:
35
Year:
1979
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.91230
File:
PDF, 336 KB
english, 1979
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