Amorphous and crystalline oxide precipitates in oxygen...

Applied Physics Letters 1986 Vol. 49; Iss. 11

Amorphous and crystalline oxide precipitates in oxygen implanted silicon

van Ommen, A. H., Koek, B. H., Viegers, M. P. A.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
49
Year:
1986
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.97061
File:
PDF, 482 KB
english, 1986
Conversion to is in progress
Conversion to is failed