Detection of monolayer quantities of oxygen on silicon...

Applied Physics Letters 1980 Vol. 37; Iss. 5

Detection of monolayer quantities of oxygen on silicon using energy-dispersive x-ray spectrometry

Musket, R. G., Strausser, Y. E.
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Volume:
37
Year:
1980
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.91737
File:
PDF, 410 KB
english, 1980
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