Characteristics of the Fluorinated High-$k$ Inter-Poly Dielectrics
Hsieh, Chih-Ren, Chen, Yung-Yu, Lu, Kwung-Wen, Lin, Gray, Lou, Jen-ChungVolume:
31
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/led.2010.2074181
Date:
December, 2010
File:
PDF, 179 KB
english, 2010